Comparison ledger
Hitachi S 9220, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 9220Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 9220 | KLA 1.112 PSL Wafer |
| Specifications | ||
| Power Supply | 100 V, 50 Hz[1] | — |
| Configuration | Single Phase[1] | NIST Traceable[4] |
| Phase | 1 Phase[2] | — |
| Voltage | 230 V[2] | — |
| Frequency | 50 Hz[2] | — |
| Manufacturer | Hitachi[1] | — |
| Model | S 9220[1] | — |
| Equipment type | SEM (Scanning Electron Microscope)[1] | — |
| Category | Metrology & Inspection[3] | — |
| Wafer size | 8 inch[1] | — |
| Included | HDD and Software included[1] | — |
| Vintage | 2000[1] | — |
| Wafer Size | — | 8 inch[4] |
| NIST Traceable | — | True[4] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[5] |
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