Comparison ledger
Hitachi SU 3800 VP Electron, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SU 3800 VP ElectronHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi SU 3800 VP Electron | KLA 1.112 PSL Wafer |
| Specifications | ||
| P/N | 52 E 4918[1] | — |
| Configuration | 100 to 240 V[1] | NIST Traceable[2] |
| Current | 1.5 KVA[1] | — |
| Part Number | 52 E 4918[1] | — |
| Power Voltage | 100 to 240 V[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Phase | Single Phase[1] | — |
| KVA | 1.5[1] | — |
| Vintage | 2021[1] | — |
| Included Accessories | Monitors, Control Panel, Track Ball, Sample Mounts, Cables, Hoses, Extra Filaments, Vacuum Pump, Air Compressor, CDs/DVDs for SEM Communication Setup[1] | — |
| Not Included | EDS, Plasma Cleaner[1] | — |
| Wafer Size | — | 8 inch[2] |
| NIST Traceable | — | True[2] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[3] |
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