Waferpedia

Comparison ledger

SU8230versus0035235-003 MMD Head

Hitachi SU8230, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SU8230Hitachi
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi SU8230KLA 0035235-003 MMD Head
Specifications
RoleCleanroom scanning electron microscope (SEM)[1]—
Facility referenceSEM-10[1]—
ManufacturerHitachi[1]—
ModelSU8230[1]0035235-003[2]
Training prerequisite noteQualification on the SEM-10 Hitachi SU8230 is a prerequisite to SP-4 training and access.[1]—
Configuration—TSTD PCB ASSY, MMD MEAS HEAD[2]
Make—KLA[2]
Part Description—TSTD PCB ASSY, MMD MEAS HEAD[2]
Compatible System—KLA AIT-XP[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]cns1.rc.fas.harvard.educns1.rc.fas.harvard.edu
  2. [2]inventory listing