Waferpedia

Comparison ledger

3 NS 411 B F 006 Atmospheric Wafer Robotversus1 DP 41

Kawasaki 3 NS 411 B F 006 Atmospheric Wafer Robot, Logitech 1 DP 41, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1 DP 41Logitech
OEMKawasakiLogitech
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKawasaki 3 NS 411 B F 006 Atmospheric Wafer RobotLogitech 1 DP 41
Specifications
ConfigurationAMAT 12" CMP[1]50/60 Hz[2]
Phase—3 Phase[2]
Voltage—480 V[2]
Make—Logitech[2]
Model—1 DP 41[2]
Frequency—50/60 Hz[2]
Current—12 amps[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing