Waferpedia

Comparison ledger

0035235-003 MMD HeadversusR54

KLA 0035235-003 MMD Head, KLA R54, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
R54KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadKLA R54
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]—
Model0035235-003[1]—
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Tool designation—4-Point-Probe-KLA-R54[2]
Equipment class—4-point probe[2]
Type—Four-point probe[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]nanousers.mit.edunanousers.mit.edu
  3. [3]nanousers.mit.edunanousers.mit.edu