Comparison ledger
KLA 1.112 PSL Wafer, LEO 1450 VPSE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1450 VPSELEO | |
|---|---|---|
| OEM | KLA | LEO |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | LEO 1450 VPSE |
| Specifications | ||
| Configuration | NIST Traceable[1] | Variable Pressure SEM Platform[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| X-ray Micro Analysis | — | Mounted EDAX EDS Microanalysis Detector Tower[3] |
| Compositional Imaging | — | KE Development Type 200 Four-Quadrant Backscattered Electro (BSE) Detector system with manual insertion control rod[3] |
| Electron source | — | Tungsten hairpin filament (standard)[4] |
| Accelerating voltage | — | 0.2 kV to 30 kV[4] |
| Resolution (high vacuum) | — | 3.5 nm at 30 kV[4] |
| Variable pressure range | — | 1 Pa to 400 Pa[4] |
| Magnification | — | 9x to 900,000x[4] |
| Probe current | — | 1 pA to (Optibeam controlled)[4] |
| Detectors | — | Everhart Thornley SE detector, Variable Pressure Secondary Electron (VPSE) detector[4] |
| Chamber dimensions | — | 300 mm x 270 mm x 224 mm[4] |
| Stage axes | — | 5-axis motorized: X=100mm, Y=125mm, Z=60mm, Tilt 0-90°, Rotation 360°[4] |
| EDS detector | — | Mounted EDAX EDS Microanalysis Detector Tower[3] |
| BSE detector | — | KE Development Type 200 Four-Quadrant Backscattered Electron Detector system with manual insertion control rod[3] |
| Active isolation platform | — | Integrated Kinetic Systems Vibraplane pneumatic active vibration dampening table frame[3] |
| Control software | — | SmartSEM column control software on dedicated terminal[3] |
| Vacuum pump | — | Floor-mounted Edwards RV mechanical rotary vane roughing/backing vacuum pump[3] |
| Lens chiller | — | Standalone closed-loop recirculating liquid laboratory lens chiller[3] |
| Tool type | — | Variable-pressure scanning electron microscope (VP-SEM)[5] |
| Category | — | Metrology & Inspection[5] |
| Resolution | — | 3.5 nm at 30 kV[5] |
| Stage | — | 5-axis motorized; X=100 mm, Y=125 mm, Z=60 mm, Tilt 0-90°, Rotation 360°[5] |
| X-ray microanalysis | — | Mounted EDAX EDS microanalysis detector tower[3] |
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