Comparison ledger
KLA 1.112 PSL Wafer, Mitutoyo FS70, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FS70Mitutoyo | |
|---|---|---|
| OEM | KLA | Mitutoyo |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Mitutoyo FS70 |
| Cited variants | — | |
| Specifications | ||
| Configuration | NIST Traceable[2] | — |
| Wafer Size | 8 inch[2] | — |
| NIST Traceable | True[2] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[3] | — |
| Product type | — | Microscope head[4] |
| Product group | — | Optical Measurement / Microscopes[4] |
| Magnification | — | up to 8,000x[5] |
| Working distance | — | up to 34mm[5] |
| Field number | — | 24[1] |
| Focus travel range | — | 50mm[1] |
| Fine focus adjustment | — | 0.1mm/rev.[1] |
| Coarse focus adjustment | — | 3.8mm/rev.[1] |
| Illumination | — | Reflective illumination for bright field (Koehler illumination, with aperture diaphragm)[1] |
| Light source | — | 12V100W fiber optics, non-stepped adjustment; light guide length 1.5m; power consumption 150W[1] |
| Pupil distance | — | 51 - 76mm[1] |
| Tilt angle | — | 0º - 20º (only -TH, -THS models)[1] |
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