Waferpedia

Comparison ledger

.496 PSL WaferversusCandela CS 2 Surface

KLA .496 PSL Wafer, KLA Candela CS 2 Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .496 PSL WaferKLA Candela CS 2 Surface
Specifications
ConfigurationNIST Traceable[1]—
Wafer size8 inch[1]—
TraceabilityNIST Traceable[1]—
Compatible systemsCapable on Surfscan 6xy0 and SP1[1]—
CategoryMetrology & Inspection[2]—
Manufacturer—KLA[3]
Model—Candela CS 2[3]
Equipment type—Surface Inspection System[3]
Description—Surface Analyzer[4]
Chuck sizes available—2", 3", 4", and 6"[4]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]semistarcorp.comsemistarcorp.com