Comparison ledger
KLA .496 PSL Wafer, Nikon SMZ 1000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SMZ 1000Nikon | |
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Nikon SMZ 1000 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Zoom Range | — | 0.8x - 8x[3] |
| Overall Magnification | — | 8x - 80x (with 10x eyepieces)[3] |
| Head Type | — | Binocular[3] |
| Eyepieces | — | 10x/22mm FOV[3] |
| Objective | — | 1x Plan Apo[3] |
| Stand Options | — | Plain Stand, LED Stand, Boom Stand[3] |
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