Comparison ledger
KLA .496 PSL Wafer, Onto Innovation MetaPulse 200 Film Thickness Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MetaPulse 200 Film Thickness MeasurementOnto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1998– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Onto Innovation MetaPulse 200 |
| Specifications | ||
| Configuration | NIST Traceable[1] | 4900 va[3] |
| Wafer size | 8 inch[1] | 8 inch[3] |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Voltage | — | 220 VAC[4] |
| Maximum Single Load | — | 5 amps at 220 VAC[4] |
| Wafer diameter | — | 200 mm[5] |
| Phase | — | Single Phase[4] |
| Frequency | — | 50/60 Hz[4] |
| Power/configuration | — | 4900 va[3] |
| Floppy drives | — | 16 Fla[3] |
| Process | — | Wafer Inspection[5] |
| Year of manufacture | — | 1998[5] |
| Ultrafast laser | — | 800 nm[5] |
| Pattern recognition | — | Included[5] |
| Controller | — | Programmable motion controller[5] |
| Computer platform | — | 266 MHz Pentium II Motherboard[5] |
| Storage | — | 2GB hard drive[5] |
| Optical drive | — | CD ROM drive[5] |
| Display | — | LCD screen[5] |
| Input devices | — | Keyboard and Trackball[5] |
| Interface | — | GEM compliant SECS-II[5] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →