Comparison ledger
KLA .496 PSL Wafer, Sonoscan Gen-6, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Gen-6Sonoscan | |
|---|---|---|
| OEM | KLA | Sonoscan |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 300mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | new generation |
| Family | KLA .496 PSL Wafer | Sonoscan Gen-6 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Technology | — | PolyGate™ technology with Multi-Gate™ and Probing-Gate™ functions capable of single and multi-focus imaging[3] |
| Gates per channel | — | Up to 100 gates per channel[3] |
| Sampling rate | — | 2 Gsps[3] |
| Scanner | — | Inertially Balanced Linear Motor Scanner[3] |
| Scan reference platform | — | Tower-mounted scan reference platform and sample fixture[3] |
| Scanning area | — | Open-access scanning area[3] |
| Scan capacity | — | Capable of scanning JEDEC trays or a 300mm wafer[3] |
| Temperature control | — | Water recirculation and optional inline temperature control[3] |
| Analysis software | — | SonoSimulator for simplified analysis of stacked die parts[3] |
| Data analysis | — | Digital Image Analysis (DIA) quantifies acoustic data and supports automatic accept/reject criteria[3] |
| Rescanning | — | Virtual Rescanning Mode (VRM) stores comprehensive data for complete analysis after the sample is no longer available[3] |
| Instrument type | — | C-mode Scanning Acoustic Microscope[3] |
| Wafer size capability | — | 300mm wafer[3] |
| Control software operating system | — | Windows 7 Ultimate[3] |
| Scanner type | — | Inertially Balanced Linear Motor Scanner[3] |
| Cooling / fluid handling | — | Water recirculation and optional inline temperature control[3] |
| Software analysis tools | — | SonoSimulator, Digital Image Analysis (DIA), and Virtual Rescanning Mode (VRM)[3] |
| Optional imaging mode | — | Frequency Domain Imaging (FDI)[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →