Waferpedia

Comparison ledger

.498 PSL WaferversusArcher 200 Overlay

KLA .498 PSL Wafer, KLA Archer 200 Overlay, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2008 introduced
Control system——
Generation——
FamilyKLA .498 PSL WaferKLA Archer
Specifications
ConfigurationNIST Traceable[1]Refurbished[2]
NIST traceabilityYes[1]—
Manufacturer—KLA[2]
Model—Archer 200[2]
Wafer Sizes—12 inch[2]
Description—Overlay system[2]
Design rule node—32nm[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]ir.kla.comir.kla.com