Waferpedia

Comparison ledger

.498 PSL WaferversusHRP 220 Surface

KLA .498 PSL Wafer, KLA HRP 220 Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
.498 PSL WaferKLA
HRP 220 SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferKLA HRP 220
Specifications
ConfigurationNIST Traceable[1]KIT, SENSOR ASSY, REPLACEMENT HRP 200[2]
NIST traceabilityYes[1]—
Make—KLA[2]
Model—HRP 220[2]
Equipment type—Surface Profilometer[2]
.498 PSL Wafer entryHRP 220 Surface entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing