Comparison ledger
KLA .498 PSL Wafer, KLA P 22 H Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Automated Wafer Handler |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | KLA P |
| Specifications | ||
| Configuration | NIST Traceable[1] | Step Height Precision Micro 2D Scanner[2] |
| NIST traceability | Yes[1] | — |
| Scan Length | — | 60 mm[2] |
| Scan Speed | — | 1 um/sec to 25mm/ sec[2] |
| Scan Method | — | Bi-directional moving stylus[2] |
| Sampling Rate | — | 5, 10, 20, 50, 100, 200, 500 , 1000 Hz[2] |
| Stylus Force | — | Adjustable between 0.05 ~ 50mg[2] |
| Step Height Repeatability, 1 | — | 0.75 nm or 0.1%:Sample Handling:[2] |
| Theta | — | 360[2] |
| Optics | — | Dual View Optics[2] |
| Stage | — | Motorized precision 200mm Diameter X-Y vacuum sample stage[2] |
| Stylus | — | 2 um Radius 60[2] |
| Operating system | — | Window based Operation system[2] |
| Monitor | — | LCD Monitor[2] |
| Vertical Range / Resolution | — | +,- 13um/0.0075A +,-65um/0.04A 327um/0.19A[2] |
| Step Height Repeatability | — | 0.75 nm or 0.1%[2] |
| Theta rotation | — | 360[2] |
| Maximum sample thickness | — | 21 mm[2] |
| Maximum sample weight | — | 1 Kg[2] |
| Automated Wafer Handler | — | 1 open loadport for 200mm and 150mm[2] |
| Wafer size | — | Automated Wafer Handler[2] |
| Data Screen | — | display scan, roughness, data summary table listing up to 27 parameters ( total 48 )[2] |
| Database Manager | — | Save & Retrieve data[2] |
| ASCII Output | — | Scan data is exportable to commercial spreadsheet programs[2] |
| Data Output | — | Data Screen (display scan, roughness, data summary table listing up to 27 parameters total 48), Database Manager, ASCII Output[2] |
| Equipment type | — | Surface profilometer[2] |
| Performance | — | Step Height Precision Micro 2D Scanner[3] |
| Data output | — | Data Screen, Database Manager, ASCII Output[2] |
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