Waferpedia

Comparison ledger

.498 PSL WaferversusKY 8030 3 3D

KLA .498 PSL Wafer, Koh Young KY 8030 3 3D, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
KY 8030 3 3DKoh Young
OEMKLAKoh Young
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferKoh Young KY 8030 3 3D
Specifications
ConfigurationNIST Traceable[1]50/60 Hz[2]
NIST traceabilityYes[1]—
Phase—1 Phase[2]
Voltage—220 Vac[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing