Waferpedia

Comparison ledger

.498 PSL WaferversusScientific FEI NanoLab 230

KLA .498 PSL Wafer, Thermo Fisher Scientific FEI NanoLab 230, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAThermo Fisher
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferThermo Fisher Scientific FEI NanoLab 230
Specifications
ConfigurationNIST Traceable[1]—
NIST traceabilityYes[1]—
Equipment type—SEM (Scanning Electron Microscope)[2]
Make—Thermo Fisher Scientific / FEI[2]
Model—NanoLab 230[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing