Comparison ledger
KLA Archer 10 XT Overlay, Veeco Dektak, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | DektakVeeco | |
|---|---|---|
| OEM | KLA | Veeco |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Archer | Veeco Dektak |
| Specifications | ||
| Configuration | During refurbishment the loadports were replaced with the cassette loader that is shown in our video below[1] | — |
| Wafer size | 200mm dual port open wafer handler[1] | — |
| OEM | KLA[2] | — |
| Model | Archer 10 XT Overlay[2] | DEKTAK 150[3] |
| Category | Metrology & Inspection[2] | — |
| Description | 200mm overlay metrology system[2] | — |
| Software version | 5.6[1] | — |
| Wafer handler | 200mm dual port open wafer handler[1] | — |
| Chuck | 8" chuck[1] | — |
| Computer upgrade | XP computer upgrade[1] | — |
| Computer | KLASS RS2 computer[1] | — |
| Manufacturer | — | Veeco[3] |
| Purpose | — | Stylus-based scanning system for measuring surface topography and thin film step heights[4] |
| Tip Size | — | 12 µm[3] |
| Standard Stylus Tip | — | 2.5 μm[4] |
| Scan Length | — | 55 - 200 mm[3] |
| Maximum Data Points per Scan | — | 120,000[3] |
| Maximum Sample Size | — | 200 mm[3] |
| Sample Diameter | — | up to 200 mm in diameter[4] |
| Sample Thickness | — | up to 90 mm thick[4] |
| Stylus Force | — | 1 - 15 mg[3] |
| X-Y Translation | — | 101.6 x 101.6 mm[4] |
| Stage Type | — | Two-axis, manual sample-positioning stage[4] |
| Stage Leveling and Rotation | — | Manual stage leveling and rotation[4] |
| Leveling | — | Two-point programmable or cursor software leveling[4] |
| Environmental Enclosure | — | Acrylic environmental enclosure[4] |
| Maximum sample thickness | — | 90 mm[4] |
| X-Y translation range | — | 101.6 x 101.6 mm[4] |
| Long scan length | — | 55 mm[4] |
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