Waferpedia

Comparison ledger

Gasonics IPEC 776versus1 DP 41

Lam Research Gasonics IPEC 776, Logitech 1 DP 41, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Gasonics IPEC 776Lam Research
1 DP 41Logitech
OEMLam ResearchLogitech
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research Gasonics IPEC 776Logitech 1 DP 41
Specifications
Wafer Size8 inch (200 mm)[1]—
Phase—3 Phase[2]
Configuration—50/60 Hz[2]
Voltage—480 V[2]
Make—Logitech[2]
Model—1 DP 41[2]
Frequency—50/60 Hz[2]
Current—12 amps[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing