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Comparison ledger

IPEC AvantGaard 776versus100R16

Lam Research IPEC AvantGaard 776, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
100R16Strasbaugh
OEMLam ResearchStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPECStrasbaugh 100R16
Cited variants
  • IPEC AvantGaard 776 Tungsten[1]
  • IPEC AvantGaard 776 (Dielectric)[2]
—
Specifications
ConfigurationDielectric[3]—
CategoryCMP[2]—
MakeLam / IPEC[1]—
ModelAvantGaard 776[2]—
Wafer size8 inch[1]—
Wafer size (version)200 mm[4]—
ProcessTungsten[1]—
Asset descriptionCMP system for spares use[4]—
type—1 spindle grinder/polisher[5]
drive system—DC drive system with 2 motors[5]
spindle RPM—1-180 RPM[5]
eccentric RPM—1-90 RPM[5]
controls—digital timer; air down switch; spindle and eccentric speed dials; air regulators[5]
capacity—16 inches[5]
spindle size—1-8 TPI[5]
overall dimensions—28 inches x 36 inches x 48 inches[5]
weight—500 lbs[5]
origin—made in the USA[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]excelltechnology.comexcelltechnology.com