Comparison ledger
Lam Research SEZ SP 203, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SEZ SP 203Lam Research | 1000PYES |
|---|---|---|
| OEM | Lam Research | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 1998 Vintage | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research SEZ SP 203 | YES 1000P |
| Cited variants |
| — |
| Specifications | ||
| Configuration | 200-208 V[2] | Parallel plate[5] |
| Phase | 3 Phase[2] | — |
| Pinless chuck | 6 Inch[2] | — |
| Software | Major Version 117[2] | — |
| Cabinet 1 | Main tank and Buffer tank[2] | — |
| Cabinet 2 | Main tank and Buffer tank[2] | — |
| Cabinet 3 | Main tank[2] | — |
| Modifications | FFU controller; 1 cabinet drain box repaired[2] | — |
| Manufacturer | Lam Research[3] | — |
| Category | Wet Processing / Clean[3] | — |
| Wafer size | 6 inch[2] | — |
| Power | 200-208 V[2] | 1000 W[5] |
| Frequency | 50/60 Hz[2] | — |
| Wafer handling | 6 Inch Bernoulli Handling[2] | — |
| Chuck | Pinless chuck: 6 Inch[2] | — |
| Vacuum exhaust | Exhaust Up[3] | — |
| Chemistry cabinets | 3 Chemistry Cabinets[3] | — |
| Software major version | 117[2] | — |
| Software minor version | 2015.08.21[2] | — |
| GEM version | GEM 5.8[2] | — |
| Known problems | Keyboard switching; Voltage fluctuations[2] | — |
| Model | — | 1000P[4] |
| System type | — | Plasma cleaning system[4] |
| Shelf configuration | — | Four 16 x 16 inch shelves[4] |
| Total capacity | — | 1024 square inches[4] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[4] |
| Number of shelves | — | 4[4] |
| Shelf size | — | 16 x 16 inches[4] |
| Operation modes | — | Active, RIE, Downstream[4] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[4] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →