Waferpedia

Comparison ledger

12 Benchtop Lapping PolishingversusWG6

Lapmaster 12 Benchtop Lapping Polishing, Logitech WG6, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
WG6Logitech
OEMLapmasterLogitech
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system—GUI
Generation——
FamilyLapmaster 12 Benchtop Lapping PolishingLogitech WG6
Specifications
MakeLapmaster[1]—
Model12[1]—
CategoryCMP[2]—
Type/ApplicationSingle sided[3]—
Plate diameter12 in[3]—
No. of conditioning rings3[4]—
ConfigurationRing lapper[4]—
BaseRigid, lightweight, cast aluminum base[4]—
Standard RPM60 RPM[4]—
RPM range with variable speed drive0-60[4]—
Drive motor - lapper0.5 HP[4]—
Drive motor - polisher0.75 HP[4]—
Length25 in[4]—
Width18 in[4]—
Height24 in[4]—
Estimated shipping weight240 lbs[4]—
Approximate weight135 lbs / 61 kg[5]—
Approximate dimensions24.5 in × 17.5 in × 23.8 in (622 mm × 445 mm × 607 mm)[5]—
Electrical systemVarious voltages; 50/60 Hz; 1 phase and 3 phase to customer specification[5]—
Motor1/3 hp / 0.25 kW motor with gear reducer[5]Powerful, low voltage DC motor[6]
Abrasive feed systemDesigned for water or oil based lapping slurries[5]—
Automatic cycle timerAutomatic digital cycle timer[5]—
Ring configurationRing lapper[4]—
Ring ID4.25 inches[4]—
System composition—PM6 or LP70 precision polishing machine plus WG6 polishing head[6]
Batch capacity—Up to 6 samples at one time[6]
LP70 capacity with two WG6 heads—Up to 12 specimens at one time[6]
Polishing head speed—Up to 35 rpm[6]
Incremental load per drive rod—Up to 1.4 kg on each individual drive rod[6]
Drive rods—Six drive rods[6]
Material—Corrosion resistant materials[6]
Large specimen example size—76 x 51 mm[6]

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (6)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]lapmaster-wolters.comlapmaster-wolters.com
  4. [4]catalog.lapmaster.comcatalog.lapmaster.com
  5. [5]lapmaster-wolters.comlapmaster-wolters.com
  6. [6]web.archive.orgweb.archive.org