Waferpedia

Comparison ledger

12 Lapperversus1500 66 T Double Sided Optical

Lapmaster 12 Lapper, PR Hoffman 1500 66 T Double Sided Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
12 LapperLapmaster
OEMLapmasterPR Hoffman
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—PR Hoffman 1500 66 T Double Sided Optical
Specifications
Outside plate diameter12 inches[1]—
Lapping Speed Range0 to 60 rpm[2]—
Wafer Size Compatibility4 inches or smaller[1]—
Input Voltage110 V[1]—
Frequency60 Hz[1]—
Phase1[1]—
Number of Rings3[1]—
Number of Weights3[1]—
Includes Slurry SystemYes[1]—
Includes TimerYes[1]—
Configuration—Capacities:[3]
Plate—15"[3]
Carriers—5.3"[3]
Teeth—66[3]
Downward force—15 - 200 Lbs.[3]
Top plate—1 - 135 RPM[3]
Ring gear—1 - 135 RPM[3]
Sun gear—1 - 103 RPM[3]
Type—double sided optical polisher[3]
Top plate speed—1 - 135 RPM[3]
Ring gear speed—1 - 135 RPM[3]
Sun gear speed—1 - 103 RPM[3]
Vintage—2000[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]jmind.comjmind.com
  2. [2]etd.ohiolink.eduetd.ohiolink.edu
  3. [3]inventory listing