Comparison ledger
Lapmaster 120 Continuous, Strasbaugh 6 DS SP Planarizer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 120 ContinuousLapmaster | 6 DS SP PlanarizerStrasbaugh |
|---|---|---|
| OEM | Lapmaster | Strasbaugh |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lapmaster 120 Continuous | Strasbaugh 6 DS SP Planarizer |
| Specifications | ||
| Wafer compatibility | — | 4", 6", 8"[1] |
| Throughput | — | 7 wafer/hour for 800sec of polishing / wafer[1] |
| Loader unit type | — | Carrier Entegris PA 194-60MB-61C02[1] |
| Number of cassettes | — | 2 lots at the same time / 4 cassettes inside the tool (2 sender, 2 receiver)[1] |
| Configuration | — | 4 cassettes inside the tool (2 sender, 2 receiver)[2] |
| Nominal wafer size | — | 6 inch[1] |