Waferpedia

Comparison ledger

1 DP 41versus6 DE DC 6

Logitech 1 DP 41, Strasbaugh 6 DE DC 6, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1 DP 41Logitech
6 DE DC 6Strasbaugh
OEMLogitechStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLogitech 1 DP 41Strasbaugh 6 DE DC 6
Cited variants—
Specifications
Phase3 Phase[2]—
Configuration50/60 Hz[2]Six Spindle[1]
Voltage480 V[2]—
MakeLogitech[2]Strasbaugh[3]
Model1 DP 41[2]6 DE DC 6[4]
Frequency50/60 Hz[2]—
Current12 amps[2]—
Type—Polisher[3]
Number of spindles—6[1]
Capacity—12 inch[1]

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing