Waferpedia

Comparison ledger

1 DP 41versus6 DS SP

Logitech 1 DP 41, Strasbaugh 6 DS SP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1 DP 41Logitech
6 DS SPStrasbaugh
OEMLogitechStrasbaugh
CategoryCMPCMP
Wafer size—Single Wafer SiC Substrate
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLogitech 1 DP 41Strasbaugh 6 DS SP
Specifications
Phase3 Phase[1]—
Configuration50/60 Hz[1]Multi Process[2]
Voltage480 V[1]208 V, 3 Phase, 60 Hz[3]
MakeLogitech[1]—
Model1 DP 41[1]—
Frequency50/60 Hz[1]—
Current12 amps[1]—
Full Load—60 A[3]
Motor—36 A[3]
Interrupting Capacity—10,000 A[3]
Wafer size—Single Wafer SiC Substrate[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing