Comparison ledger
Logitech 1 DP 41, Strasbaugh 6 DS SP Planarizer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1 DP 41Logitech | 6 DS SP PlanarizerStrasbaugh |
|---|---|---|
| OEM | Logitech | Strasbaugh |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Logitech 1 DP 41 | Strasbaugh 6 DS SP Planarizer |
| Specifications | ||
| Phase | 3 Phase[1] | — |
| Configuration | 50/60 Hz[1] | 4 cassettes inside the tool (2 sender, 2 receiver)[3] |
| Voltage | 480 V[1] | — |
| Make | Logitech[1] | — |
| Model | 1 DP 41[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Current | 12 amps[1] | — |
| Wafer compatibility | — | 4", 6", 8"[2] |
| Throughput | — | 7 wafer/hour for 800sec of polishing / wafer[2] |
| Loader unit type | — | Carrier Entegris PA 194-60MB-61C02[2] |
| Number of cassettes | — | 2 lots at the same time / 4 cassettes inside the tool (2 sender, 2 receiver)[2] |
| Nominal wafer size | — | 6 inch[2] |