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Comparison ledger

1 DP 41versusPA 300 Control

Logitech 1 DP 41, SUSS MicroTec PA 300 Control, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1 DP 41Logitech
PA 300 ControlSUSS MicroTec
OEMLogitechSUSS MicroTec
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLogitech 1 DP 41SUSS MicroTec PA 300
Specifications
Phase3 Phase[1]—
Configuration50/60 Hz[1]500 VA, 115V, 60Hz[2]
Voltage480 V[1]—
MakeLogitech[1]—
Model1 DP 41[1]—
Frequency50/60 Hz[1]—
Current12 amps[1]—
Category—CMP[3]
Power—500 VA, 115V, 60Hz[2]
Wafer handling—12" Nickel Plated Aluminum Chuck[2]
Control & software—ATT M300 Temp Control Unit[3]
Optics—10X, 2X Mitutoyo Plan Apo Objective, 2ea[2]
Configuration & options—Cascade CMPS-888 Microscope; Suss PH150 Micropositioner, 4ea[2]
Chuck—12-inch nickel plated aluminum chuck[2]
Control unit—ATT M300 Temp Control Unit[3]
Microscope—Cascade CMPS-888 Microscope[2]
Micropositioners—Suss PH150 Micropositioner, 4ea[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com