Comparison ledger
Logitech 1 DP 41, Yaskawa XU RSM 53 E 0 Atmospheric Wafer Robot, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1 DP 41Logitech | |
|---|---|---|
| OEM | Logitech | Yaskawa |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Logitech 1 DP 41 | Yaskawa XU RSM 53 E 0 Atmospheric Wafer Robot |
| Specifications | ||
| Phase | 3 Phase[1] | — |
| Configuration | 50/60 Hz[1] | With XU-CM6180 Controller, Compatible with Ebara FREX 300 CMP[2] |
| Voltage | 480 V[1] | — |
| Make | Logitech[1] | — |
| Model | 1 DP 41[1] | XU RSM 53 E 0[2] |
| Frequency | 50/60 Hz[1] | — |
| Current | 12 amps[1] | — |
| Equipment type | — | Atmospheric Wafer Robot[2] |
| Category | — | CMP[3] |
| Wafer size | — | 12 inch[2] |
| Controller | — | XU-CM6180 Controller[3] |
| Compatibility | — | Compatible with Ebara FREX 300 CMP[2] |