Waferpedia

Comparison ledger

AST 2800 RTPversus0332 F 9453 302 Diffusion

Mattson AST 2800 RTP, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMMattsonVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyMattson AST 2800Varian 0332 F 9453 302 Diffusion
Specifications
ConfigurationRefurbished[1]—
Asset Number—142841[2]
Last Confirm Date—October 14, 2025[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]fab-spares.comfab-spares.com