Waferpedia

Comparison ledger

0020 Contour ProjectorversusNewview 5000 White Light

OGP 0020 Contour Projector, Zygo Newview 5000 White Light, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMOGPZygo
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyOGP (Optical Gaging Products) 0020 Contour Projector—
Specifications
Configuration50-60 Cycle[1]—
Voltage115 V[1]—
Tool type—Non-contact 3D surface profiler[2]
Measurement method—Scanning white light interferometry[2]
Objectives—5x, 10x, 50x[2]
Vertical resolution—0.1-20nm (FDA resolution setting dependent)[2]
Lateral resolution range—0.64-2.6μm (objective dependent)[2]
Max vertical step height—5mm[2]
Vertical scan rate—≤ 10μm/sec[2]
Sample type—Opaque and transparent surfaces[2]
Max roughness—≤ 100μm Rp[2]
Reflectivity—4-100%[2]
Max sample thickness—104mm[2]
Objective working distances—5x = 9.3mm; 10x = 7.4mm; 50x = 3.4mm[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]ssel-sched.eecs.umich.edussel-sched.eecs.umich.edu
  3. [3]ssel-sched.eecs.umich.edussel-sched.eecs.umich.edu