Waferpedia

Comparison ledger

V 3 Batch Wafer Processingversus11600 SRD

Santa Clara Plastics V 3 Batch Wafer Processing, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
V 3 Batch Wafer ProcessingSanta Clara Plastics
11600 SRDSemitool
OEMSanta Clara PlasticsSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySanta Clara Plastics V 3 Batch Wafer ProcessingSemitool 11600 SRD
Specifications
ConfigurationPlatinum Strip[1]Ceramic[3]
Wafer Size8 inch[2]—
Manufacturer—Semitool[3]
Model—11600 SRD[3]
Equipment type—Spin Rinse Dryer[3]

Plan your fab

Building a Wet Processing / Clean process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing