Comparison ledger
SCREEN AS 2000, SUSS MicroTec PA 300 Control, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AS 2000SCREEN | PA 300 ControlSUSS MicroTec |
|---|---|---|
| OEM | SCREEN | SUSS MicroTec |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN AS 2000 | SUSS MicroTec PA 300 |
| Specifications | ||
| Configuration | Dual brush and top side brush chambers, spin dry[2] | 500 VA, 115V, 60Hz[5] |
| Gas | 1:100 DHF, 1:100 NH4OH[2] | — |
| OS | Windows NT[2] | — |
| Power | 0.750KVA transformer[3] | 500 VA, 115V, 60Hz[5] |
| Missing | HLS cards / condition not well[3] | — |
| Wafer Size | 8 inch[4] | — |
| Brush Chambers | Dual brush and top side brush chambers[2] | — |
| Spin Dry | Yes[2] | — |
| Process Gases | 1:100 DHF, 1:100 NH4OH[2] | — |
| Operating System | Windows NT[2] | — |
| Vintage Year (example unit) | 1998[2] | — |
| Vintage Year (another unit) | 1999[3] | — |
| Category | — | CMP[1] |
| Wafer handling | — | 12" Nickel Plated Aluminum Chuck[5] |
| Control & software | — | ATT M300 Temp Control Unit[1] |
| Optics | — | 10X, 2X Mitutoyo Plan Apo Objective, 2ea[5] |
| Configuration & options | — | Cascade CMPS-888 Microscope; Suss PH150 Micropositioner, 4ea[5] |
| Chuck | — | 12-inch nickel plated aluminum chuck[5] |
| Control unit | — | ATT M300 Temp Control Unit[1] |
| Microscope | — | Cascade CMPS-888 Microscope[5] |
| Micropositioners | — | Suss PH150 Micropositioner, 4ea[5] |