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SPW 813 Aversus003163-000 SRD

SCREEN SPW 813 A, Semitool 003163-000 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
SPW 813 ASCREEN
003163-000 SRDSemitool
OEMSCREENSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySCREEN SPW 813 ASemitool 003163-000 SRD
Specifications
Wafer Sizes8 inch[1]—
Product TypeScrubber[2]—
OEMSCREEN / DNS[4]—
ModelSPW 813 A[4]003163-000[5]
Wafer size8 inch[4]—
Equipment typeScrubber[2]Spin Rinse Dryer (SRD)[5]
Make—Semitool[5]
Asset #—139375[5]
Last Confirm Date—September 03, 2025[5]
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Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]semi-sps.comsemi-sps.com
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing