Comparison ledger
SCREEN WS 820 L Single Wafer, Semitool 003163-000 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | WS 820 L Single WaferSCREEN | 003163-000 SRDSemitool |
|---|---|---|
| OEM | SCREEN | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN WS 820 L Single Wafer | Semitool 003163-000 SRD |
| Specifications | ||
| Wafer size | 200 mm[1] | — |
| Transfer type | Carrierless[1] | — |
| Maximum processing baths | 13[1] | — |
| Maximum transfer robots | 6[1] | — |
| Make | — | Semitool[2] |
| Model | — | 003163-000[2] |
| Equipment type | — | Spin Rinse Dryer (SRD)[2] |
| Asset # | — | 139375[2] |
| Last Confirm Date | — | September 03, 2025[2] |
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