Waferpedia

Comparison ledger

003163-000 SRDversus270 S SRD

Semitool 003163-000 SRD, Semitool 270 S SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
270 S SRDSemitool
OEMSemitoolSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySemitool 003163-000 SRDSemitool 270 S SRD
Specifications
MakeSemitool[1]Semitool[2]
Model003163-000[1]270 S[2]
Equipment typeSpin Rinse Dryer (SRD)[1]Spin Rinse Dryer (SRD)[2]
Asset #139375[1]—
Last Confirm DateSeptember 03, 2025[1]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing