Comparison ledger
SUSS MicroTec AD12, SUSS MicroTec AS8 / 12, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AD12SUSS MicroTec | AS8 / 12SUSS MicroTec |
|---|---|---|
| OEM | SUSS MicroTec | SUSS MicroTec |
| Category | — | — |
| Wafer size | 300mm | 300mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec AD12 | SUSS MicroTec AS8 / 12 |
| Specifications | ||
| Operation | Manual[1] | Manual[1] |
| Wafer size | 300 mm[1] | — |
| Process type | Aqueous[1] | — |
| Capabilities | Puddle developing, Spray developing, Wafer cleaning[1] | — |
| Wafer Size | — | up to 300 mm[1] |
| Process | — | Spray Coating[1] |