Comparison ledger
SUSS MicroTec MA6/MA4, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MA6/MA4SUSS MicroTec | 1000 FamilyUltratech |
|---|---|---|
| OEM | SUSS MicroTec | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | wafers up to 4″ (MA4) or 6″ (MA6); also 1 cm² pieces | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec MA6/MA4 | Ultratech 1000 Family |
| Cited variants | — | |
| Specifications | ||
| Exposure resolution | < 1 µm[1] | — |
| Alignment accuracy | Topside – 500 nm[1] | — |
| Exposure modes | Hard contact, soft contact, proximity, flood[1] | — |
| Spectral range | 365 nm – 405 nm[1] | — |
| Substrate accommodation | 1 cm² pieces and wafers up to 4″ (MA4) or 6″ (MA6)[1] | — |
| Uniformity | +/- 5% over exposure area[1] | — |
| Image capture | CCD camera and monitor[1] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[2] |
| Optical design | — | Wynne Dyson[2] |
| Magnification | — | 1X[2] |
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