Comparison ledger
SVG 661 HT, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 661 HTSVG | 1000 FamilyUltratech |
|---|---|---|
| OEM | SVG | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | Mask / Wafer Handling: | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SVG 661 HT | Ultratech 1000 Family |
| Specifications | ||
| Configuration | Refurbished in 2022[1] | — |
| Process | Photo Exposure[1] | — |
| Heat Exchanger / Chiller | Blower[1] | — |
| Wafer size | Mask / Wafer Handling:[1] | — |
| OEM | SVG[1] | — |
| Model | 661 HT[1] | — |
| Equipment type | Aligner[1] | — |
| Category | Lithography[2] | — |
| Optics | High Throughput Coated Optics (HT)[1] | — |
| Performance | Integrated Uniformity Tester[1] | — |
| Software | OS 2000 Hardware and Software v29.x or Higher[1] | — |
| Host link | SEMI-GEM E 30 & HSMS # 37 Compliant Host Link[1] | — |
| Chamber Type | M 500 / 600[1] | — |
| Cassette Stage | 150 mm no smf[1] | — |
| Wafer Mapping | Optical Sensor[1] | — |
| Control System | OS 2000[1] | — |
| Air Cooler | 39,000 BTU 220 Vac 3 Ф[1] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[3] |
| Optical design | — | Wynne Dyson[3] |
| Magnification | — | 1X[3] |
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