Waferpedia

Comparison ledger

1300 Series SafetyversusUW 300 Wafer

Thermo Fisher 1300 Series Safety, Tokyo Electron UW 300 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1300 Series SafetyThermo Fisher
UW 300 WaferTokyo Electron
OEMThermo FisherTokyo Electron
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones2026 Third-party support only—
Control system——
Generation——
FamilyThermo Fisher 1300Tokyo Electron UW 300 Wafer
Specifications
ConfigurationClass II[1]—
Cabinet typeClass II, Type A2 biological safety cabinet[2]—
Airflow compensationSmartFlow airflow compensation system[2]—
MotorsDual DC motors[2]—
Front window designSmartClean front window design[2]—
Control panelIntuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[2]—
UV lightProgrammable UV light[2]—
SmartPortSmartPort convenience for routing tubing and cables through the side walls[2]—
Available widths3-foot, 4-foot, 5-foot, and 6-foot sizes[2]—
Front opening choices8-inch or 10-inch front opening[2]—
Filter specificationH14 HEPA filters, EN 1822, 99.995% @ MPPS[3]—
CertificationNSF/ANSI 49, UL, CE[3]—
Service valvesUp to 6 total, 3 on each side wall[3]—

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]thermofisher.comthermofisher.com
  3. [3]documents.thermofisher.comdocuments.thermofisher.com