Waferpedia

Comparison ledger

SM 32 Cversus-Mist 850 Electronic Air Filter

Thermotron SM 32 C, Tri -Mist 850 Electronic Air Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SM 32 CThermotron
OEMThermotronTri
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyThermotron SM 32 CTri -Mist 850 Electronic Air Filter
Specifications
Volume32 Cubic Feet[1]—
Interior Dimensions37"W x 37"D x 37"H[1]—
Temperature Range-40C to 180C (-40F to 356F)[1]—
Temperature Control Tolerance+/- 0.3C[1]—
Humidity Range20% to 95%[1]—
Compressor2 HP[1]—
Electrical Requirements460V/60Hz/3Ph/18.5A[1]—
Machine Dimensions (approximate)63"W x 63"D x 98"H[1]—
Weight (approximate)2,200 lbs[1]—
ControllerThermotron 8200 (door mounted)[1]—
Serial Number22593-S[1]—
Year of Manufacture1993[1]—

Plan your fab

Building a Lab & Support Equipment process? Get a complete equipment list.

Open the fab equipment planner →
Sources (1)Every fact above is drawn from these public sources
  1. [1]libertymachinery.comlibertymachinery.com