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Comparison ledger

Clean Track Act 12versus1000FP

Tokyo Electron Clean Track Act 12, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
Clean Track Act 12Tokyo Electron
1000FPYES
OEMTokyo ElectronYES
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyTokyo Electron Clean TrackYES 1000FP
Cited variants
  • CLEAN TRACK ACT 12/8[1]
  • CLEAN TRACK ACT 12 SOD / 8 SOD[1]
—
Specifications
ConfigurationSingle Block[2]—
Block configurationSingle Block[2]—
Coating units2[2]—
Developing units2[2]—
Air supply accessory (variants)Shinwa ESA CFCP-8-00; Shinwa T&H ESA-8-F-02[2]—
Power box modelPB121-I150-YA-L1T, 200-200V/3ph/50~60Hz[3]—
Solvent distribution station2-Door Stainless Steel[3]—
Recirculating temperature controllerSMC Thermo-Con Model INR-244-265A-3004-X17, 200V/3ph/60Hz; PolyScience DuraChill Model DCA304D1, 200-230V/3ph/50-60Hz[3]—
Air supply systemShinwa Model T&H-ESA-2S-T-01, 200-230V/3ph/50-60Hz[3]—
Equipment typeCoater / Developer[2]—
OEMTokyo Electron[1]—
ModelClean Track Act 12[2]Glen/YES 1000FP[4]
Developers2[2]—
Associated air supply systemShinwa T&H ESA-8-F-02 Temperature and Humidity Controlled Air Supply System[2]—
Associated temperature and humidity controlled air supply systemShinwa Model T&H-ESA-2S-T-01 Temperature and Humidity Controlled Air Supply System[3]—
System type—Plasma cleaning system[4]
Line—R-Series Plasma Cleaning Systems (Glen Technologies)[4]
Designed use—Designed to accept a range of shelf sizes[4]
Application focus—Changing needs of the flat panel industry[4]
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Sources (4)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]web.archive.orgweb.archive.org