Tokyo Electron
Expedius Plus alternatives
Comparable Wet Processing / Clean equipment documented in the Waferpedia catalog.
6 comparable tools
Lam Research
SEZ SP 304
Wet Processing / Clean
Lam Research SEZ SP 304 is a single-wafer processing wet cleaning tool stated to handle 8-inch wafers.
Veeco
Waferstorm M 3305 Lift Off
Robotic Wafer Handler:
Wet Processing / Clean
The Veeco / SSEC Waferstorm M 3305 is a lift off machine.
Semitool
003163-000 SRD
Wet Processing / Clean
YES
1000FP
Wet Processing / Clean
The Glen/YES 1000FP is a plasma cleaning system designed to accept a range of shelf sizes for changing flat panel industry needs.
YES
1000P
Wet Processing / Clean
The 1000P is a plasma cleaning system with four 16 x 16 inch shelves and a total capacity of 1024 square inches.
Semitool
11600 SRD
Wet Processing / Clean
The Semitool 11600 SRD is a spin rinse dryer manufactured by Semitool.
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