Comparison ledger
Tokyo Electron Mark 7, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Mark 7Tokyo Electron | 1000PYES |
|---|---|---|
| OEM | Tokyo Electron | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Tokyo Electron Mark | YES 1000P |
| Cited variants |
| — |
| Specifications | ||
| Configuration | 1C2D[2] | Parallel plate[5] |
| Wafer size range | 5 inch to 8 inch[3] | — |
| Wafer transport | Vacuumless robotic transport[3] | — |
| Chuck types | Mechanical and vacuum chucks for top and back side cleaning[3] | — |
| Brush control | Automatic brush pressure controller[3] | — |
| Optional cleaning | Jet or megasonic cleaning[3] | — |
| Host communication | GEM host communication[3] | — |
| Interface | SMIF interface[3] | — |
| Compliance | S2-93 and CE mark[3] | — |
| Vintage | 2011 | — |
| Coaters & Developers Vintage | 2011 | — |
| Model | — | 1000P[4] |
| System type | — | Plasma cleaning system[4] |
| Shelf configuration | — | Four 16 x 16 inch shelves[4] |
| Total capacity | — | 1024 square inches[4] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[4] |
| Number of shelves | — | 4[4] |
| Shelf size | — | 16 x 16 inches[4] |
| Power | — | 1000 W[5] |
| Operation modes | — | Active, RIE, Downstream[4] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[4] |
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