Waferpedia

Comparison ledger

-Mist 850 Electronic Air FilterversusVHS 4

Tri -Mist 850 Electronic Air Filter, Varian VHS 4, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
VHS 4Varian
OEMTriVarian
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyTri -Mist 850 Electronic Air FilterVarian VHS
Specifications
Pumping Speed—1200 l/s[1]
ASA Type Flange—9 in. OD, 5.9 in. ID[1]
Voltage—120V, 50/60 Hz[1]
Voltage/Frequency—120V, 50/60 Hz[1]

Plan your fab

Building a Lab & Support Equipment process? Get a complete equipment list.

Open the fab equipment planner →
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing