Comparison ledger
Varian 0216 7696, E 11368072 ESC, Varian E 220, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | E 220Varian | |
|---|---|---|
| OEM | Varian | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1995 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 0216 7696, E 11368072 ESC | Varian E 220 |
| Specifications | ||
| Configuration | Platen ADV-S Type[1] | 5 Wire[3] |
| Type | ESC Platen ADV-S Type[1] | — |
| Category | Ion Implantation[2] | Ion Implantation[4] |
| Phase | — | 3 Phase[3] |
| Manufacturer | — | Varian[3] |
| Model | — | E 220[3] |
| System type | — | Ion implanter[4] |
| Electrical phase | — | 3-phase[3] |
| Wiring | — | 5-wire[3] |
| Voltage | — | 208 Volts[3] |
| E-clamp capability | — | E-clamp 6"[3] |
| Processing | — | Single blade processing[3] |
| Loading chambers | — | Two loading chambers[3] |
| Implants | — | Ar, AsH3, BF3 and PH3[3] |
| Vintage | — | 1995 Vintage[3] |
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