Comparison ledger
Varian 0216 7696, E 11368072 ESC, Varian E 500 HP Medium Current Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | Varian | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2019 Upgrade to E500 |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 0216 7696, E 11368072 ESC | Varian E 500 HP Medium Current Ion |
| Specifications | ||
| Configuration | Platen ADV-S Type[1] | 5 Wire[3] |
| Type | ESC Platen ADV-S Type[1] | — |
| Category | Ion Implantation[2] | — |
| Phase | — | 3 Phase[3] |
| Manufacturer | — | Varian[3] |
| Model | — | E 500 HP[3] |
| Equipment type | — | Medium current ion implanter[4] |
| Wafer size | — | 6 inch[3] |
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