Comparison ledger
Varian 0216 7696, E 11368072 ESC, Varian Kestrel II 750, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Kestrel II 750Varian | |
|---|---|---|
| OEM | Varian | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | 10 Site Disk, 10 Wafer per Batch |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 0216 7696, E 11368072 ESC | Varian Kestrel II 750 |
| Specifications | ||
| Configuration | Platen ADV-S Type[1] | High current[3] |
| Type | ESC Platen ADV-S Type[1] | — |
| Category | Ion Implantation[2] | Ion Implantation[5] |
| Energy Range | — | 10 - 3750 kV[4] |
| Wafer size | — | 10 Site Disk, 10 Wafer per Batch[5] |
| Voltage | — | 30 kV Terminal PS[4] |
| Wafer Size | — | 8 inch[3] |
| Batch Size | — | 10 Wafers per Batch[4] |
| Disk Sites | — | 10 Site Disk[4] |
| Gas Modules | — | 4 Gas Modules[4] |
| Gases | — | Argon (factory inlet), PH3 SDS, AsH3 SDS, BF3 SDS[4] |
| Automatic Handling | — | Yes[4] |
| Software Version | — | 6.41[5] |
| High Current | — | Yes[5] |
| Power Supply Interface (PSI) Controller | — | Included[5] |
| Source Vacuum Controller | — | Included[5] |
| Manipulator Controller | — | Included[5] |
| 30 kV Terminal PS | — | Included[5] |
| 60 kV Tube Lens PS | — | Included[5] |
| Handling system | — | Automatic Handling system[4] |
| Gas box | — | Fully Automated Gas Box, 4 Gas Modules[4] |
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