Waferpedia

Comparison ledger

6112versusPB8-2P-CP

YES 6112, YES PB8-2P-CP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
6112YES
OEMYESYES
CategoryThermal / DiffusionThermal / Diffusion
Wafer size8 in. wafers8 in. wafers
Process node——
Introduced2000—
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyYES 6112YES PB8-2P-CP
Cited variants—
  • YES-PB-6-2P-CP[1]
  • YES PB12-2P-CP[1]
Specifications
Capacity4 cassettes of 8 in. wafers[2]—
Cleanliness< 10 x 0.5 - micron particles per 8-in. wafer[2]—
Throughput2 full loads/hr.[2]—
HMDS usage<7 ml/200 wafers (>50 prime cycles/pint)[2]—
Temperature160°C max[2]—
Outer systemstainless steel[2]—
Manufacturer—Yield Engineering Systems (YES)[3]
Model—YES-PB8-2P-CP[3]
Product family—Polyimide Bake Ovens / High Temperature Vacuum Bake/Cure Ovens for BCB/Polyimide[1]
Wafer capacity—2 cassettes of 8 in. wafers[1]
Chamber configuration—Single compartment[1]
Chamber description—9.9 in. x 25.7 in. deep chamber[1]
Controller—CTC Controller with Color Touchscreen[1]
Listed options—Cooling Package[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]web.archive.orgweb.archive.org
  3. [3]web.archive.orgweb.archive.org