Comparison ledger
ABM -407B-1-S-CES293 Robot, Lam Research Concept Two Speed, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Concept Two SpeedLam Research | |
|---|---|---|
| OEM | ABM | Lam Research |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Lam Research Concept Two |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-1-S-CES293[2] | Concept Two Speed[3] |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Configuration | — | 1 Shrink chamber[3] |
| Manufacturer | — | Lam Research[4] |
| Configuration option | — | Shrink chamber[4] |
| Asset # | — | 68566[3] |
| Make | — | Lam / Novellus[3] |
| Process type | — | Etch chamber[1] |
| Platform | — | Novellus Concept Two platform[1] |
| Voltage | — | 208 VAC[1] |
| Phase | — | 3 phase[1] |
| Frequency | — | 50/60 Hz[1] |
| Type | — | Chamber Only[1] |
| Full load current | — | 21 A[1] |
| Main breaker rating | — | 25 A[1] |
| Largest load | — | 8 A[1] |
| Intended wafer size | — | 8 inch[5] |
| Wafer shape | — | Notch[5] |
| SMIF interface | — | Yes[5] |