Comparison ledger
ABM -407B-1-S-CES293 Robot, MPM Accela, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AccelaMPM | |
|---|---|---|
| OEM | ABM | MPM |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | MPM Accela |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | — |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Maximum Board Size (X x Y) | — | 558 mm x 508 mm (22” x 20”)[2] |
| Minimum Board Size (Y x X) | — | 50.8 mm x 50.8 mm (2” x 2”)[2] |
| Maximum Board Weight | — | 7 kg (15 lb)[2] |
| Board Edge Clearance | — | Configurable to 3 mm (0.120”) or 5 mm (0.200”)[2] |
| Transport Speed | — | 8 mm/sec to 1270 mm/sec (0.3”/sec to 50”/sec)[2] |
| Transport Height From Floor | — | 813 mm to 1041 mm (32” to 41”)[2] |
| Transport Track Feed Direction | — | Left-Right, Right-Left, Right-Right, Left-Left[2] |
| Maximum Print Area (X x Y) | — | 558 mm x 508 mm (22” x 20”)[2] |
| Snap-off | — | -0.025 mm to 12.7 mm (-0.001” to 0.500”)[2] |
| Print Speed | — | 6 mm/sec to 305 mm/ sec (0.25”/sec to 12”/sec)[2] |
| Print Force | — | 0.4 kg to 22 kg (0.9 lb to 50 lb)[2] |
| Print Stroke | — | ±280 mm (±11”) from center[2] |
| Stencil Frame Size | — | 737 mm x 737 mm (29” x 29”) adjustable to 584mm x 584 mm, (23” x 23”) for tubular frames[2] |
| Vision Field-of-View (FOV) | — | 10.6 mm x 8.0 mm (0.417” x 0.315”)[2] |
| Total System Alignment | — | ±12.5 microns Accuracy and Repeatability (±0.0005”) at 6 sigma, Cpk of greater than or equal to 2.0[2] |
| Wet Print Deposit | — | ±25 microns Accuracy and Repeatability (±0.001”) at 6 sigma, Cpk of greater than or equal to 2.0[2] |
| Cycle Time | — | Less than 5.5 sec[2] |
| Power Requirements | — | 200 to 240 V AC (±10%) single phase @ 50/60Hz, 15A[3] |
| Machine Weight | — | 2205 kg (4850 lb)[2] |
| Width | — | 1357 mm (53.4")[3] |
| Depth | — | 2169 mm (85.4")[3] |
| Height (excluding light tower) | — | 1950 mm (76.7")[3] |